Eureka and Friends Hosted by CXRO
Thursday, 18 January 2024 -
14:00
Monday, 15 January 2024
Tuesday, 16 January 2024
Wednesday, 17 January 2024
Thursday, 18 January 2024
14:00
Tour of facilities by CXRO Team
Tour of facilities by CXRO Team
14:00 - 15:15
Room: ALS Facilities
(for on-site visitors who are interested)
15:30
Welcome & Introductions
Welcome & Introductions
15:30 - 15:45
Room: Auditorium
Welcome to LBNL and CXRO 40 Years of CXRO Acknowledgment of departing Director
15:45
CXRO Overview
-
Bruno La Fontaine
CXRO Overview
Bruno La Fontaine
15:45 - 16:15
Room: Auditorium
16:15
MET5 Update
-
Ryan Miyakawa
MET5 Update
Ryan Miyakawa
16:15 - 17:00
Room: Auditorium
17:00
Break
Break
17:00 - 17:15
Room: Auditorium
17:15
EUV Resists Fundamentals update
-
Oleg Kostko
EUV Resists Fundamentals update
Oleg Kostko
17:15 - 17:45
Room: Auditorium
17:45
SHARP EUV Aerial Image Microscope Update
-
Markus Benk
SHARP EUV Aerial Image Microscope Update
Markus Benk
17:45 - 18:15
Room: Auditorium
18:15
Closing remarks
-
Bruno La Fontaine
Closing remarks
Bruno La Fontaine
18:15 - 18:30
Room: Auditorium
18:30
Hors-D'Oeuvres and Refreshments
Hors-D'Oeuvres and Refreshments
18:30 - 20:00
Room: Auditorium