Eureka and Friends Hosted by CXRO
Thursday, January 18, 2024 -
2:00 PM
Monday, January 15, 2024
Tuesday, January 16, 2024
Wednesday, January 17, 2024
Thursday, January 18, 2024
2:00 PM
Tour of facilities by CXRO Team
Tour of facilities by CXRO Team
2:00 PM - 3:15 PM
Room: ALS Facilities
(for on-site visitors who are interested)
3:30 PM
Welcome & Introductions
Welcome & Introductions
3:30 PM - 3:45 PM
Room: Auditorium
Welcome to LBNL and CXRO 40 Years of CXRO Acknowledgment of departing Director
3:45 PM
CXRO Overview
-
Bruno La Fontaine
CXRO Overview
Bruno La Fontaine
3:45 PM - 4:15 PM
Room: Auditorium
4:15 PM
MET5 Update
-
Ryan Miyakawa
MET5 Update
Ryan Miyakawa
4:15 PM - 5:00 PM
Room: Auditorium
5:00 PM
Break
Break
5:00 PM - 5:15 PM
Room: Auditorium
5:15 PM
EUV Resists Fundamentals update
-
Oleg Kostko
EUV Resists Fundamentals update
Oleg Kostko
5:15 PM - 5:45 PM
Room: Auditorium
5:45 PM
SHARP EUV Aerial Image Microscope Update
-
Markus Benk
SHARP EUV Aerial Image Microscope Update
Markus Benk
5:45 PM - 6:15 PM
Room: Auditorium
6:15 PM
Closing remarks
-
Bruno La Fontaine
Closing remarks
Bruno La Fontaine
6:15 PM - 6:30 PM
Room: Auditorium
6:30 PM
Hors-D'Oeuvres and Refreshments
Hors-D'Oeuvres and Refreshments
6:30 PM - 8:00 PM
Room: Auditorium