Eureka and Friends Hosted by CXRO

Thursday 18 Jan 2024, 14:00 → 20:00 US/Pacific

Auditorium (Bldg 66)

Welcome to the First Eureka and Friends Workshop hosted by the Center for X-Ray Optics (CXRO) at LBNL.  

We plan to provide an overview of the current research and facilities at CXRO, with an outlook of what we are planning for the future.

The main topics will be:

- The MET5 0.5NA micro-exposure tool

- Resist fundamentals

- EUV imaging / mask aerial image tool

This will be a hybrid meeting on 18 January 2024, starting at 3:30pm (Pacific Standard Time) at Lawrence Berkeley National Laboratory, in Building 66 - Auditorium for on-site participants.  Online participants can join the meeting via Microsoft Teams. 

Please submit your registration HERE if you are attending the meeting.

We look forward to seeing you either in person or online!

If you have any questions, please contact 

Bruno La Fontaine (CXRO Director)
[email protected]
+1-408-505-6545

Lady Bonifacio - Event Coordinator
[email protected]
+1-510-691-4998

1 Tour of facilities by CXRO Team

(for on-site visitors who are interested)

2 Welcome & Introductions

Welcome to LBNL and CXRO
40 Years of CXRO
Acknowledgment of departing Director

3 CXRO Overview

Speaker: Bruno La Fontaine

4 MET5 Update

Speaker: Ryan Miyakawa

17:00 Break

Play slideshow of CXRO through the years

5 EUV Resists Fundamentals update

Speaker: Oleg Kostko

6 SHARP EUV Aerial Image Microscope Update

Speaker: Markus Benk

7 Closing remarks

Speaker: Bruno La Fontaine

8 Hors-D'Oeuvres and Refreshments