Second Hyper-NA EUVL Infrastructure Readiness Workshop
Sunday, 21 September 2025 -
08:00
Monday, 15 September 2025
Tuesday, 16 September 2025
Wednesday, 17 September 2025
Thursday, 18 September 2025
Friday, 19 September 2025
Saturday, 20 September 2025
Sunday, 21 September 2025
09:00
Welcome
-
Bruno La Fontaine
(
LBL-CXRO)
)
Welcome
Bruno La Fontaine
(
LBL-CXRO)
)
09:00 - 09:15
Room: Grace Dodge Auditorium
09:15
Introduction
Introduction
09:15 - 09:45
Room: Grace Dodge Auditorium
09:45
Chipmaker perspective
-
Florian Gstrein
(
Intel
)
Chipmaker perspective
Florian Gstrein
(
Intel
)
09:45 - 10:35
Room: Grace Dodge Auditorium
10:35
Break
Break
10:35 - 10:45
Room: Grace Dodge Auditorium
10:45
Tool & Imaging
-
Mark van de Kerkhof
(
ASML
)
Tool & Imaging
Mark van de Kerkhof
(
ASML
)
10:45 - 11:35
Room: Grace Dodge Auditorium
11:35
Metrology & Inspection
-
Hiroki Miayi
(
Lasertec
)
Metrology & Inspection
Hiroki Miayi
(
Lasertec
)
11:35 - 12:25
Room: Grace Dodge Auditorium
12:25
Lunch
Lunch
12:25 - 13:30
Room: Dining Hall
13:30
Patterning materials (resists)
-
Amrit Narasimhan
(
Inpria
)
Patterning materials (resists)
Amrit Narasimhan
(
Inpria
)
13:30 - 14:20
Room: Grace Dodge Auditorium
14:20
Process / pattern transfer
-
Danilo De Simone
(
IMEC
)
Process / pattern transfer
Danilo De Simone
(
IMEC
)
14:20 - 15:10
Room: Grace Dodge Auditorium
15:10
Break
Break
15:10 - 15:25
Room: Grace Dodge Auditorium
15:25
Time for discussion & review instant polling results
Time for discussion & review instant polling results
15:25 - 16:15
Room: Grace Dodge Auditorium
16:15
Summarize agreements / common understanding
Summarize agreements / common understanding
16:15 - 16:45
Room: Grace Dodge Auditorium
16:45
Closing remarks
Closing remarks
16:45 - 17:15
Room: Grace Dodge Auditorium