Name: Second Hyper-NA EUVL Infrastructure Readiness Workshop
Start: 2025-09-21T08:00:00-07:00
End: 2025-09-21T17:15:00-07:00
Location: Asilomar Conference Grounds

Second Hyper-NA EUVL Infrastructure Readiness Workshop

Sunday 21 September 2025 - 08:00

Monday 15 September 2025
Tuesday 16 September 2025
Wednesday 17 September 2025
Thursday 18 September 2025
Friday 19 September 2025
Saturday 20 September 2025
Sunday 21 September 2025
09:00 Welcome - Bruno La Fontaine (LBL-CXRO))
Welcome
- Bruno La Fontaine (LBL-CXRO))
09:00 - 09:15
Room: Grace Dodge Auditorium
09:15 Introduction
Introduction
09:15 - 09:45
Room: Grace Dodge Auditorium
09:45 Chipmaker perspective - Florian Gstrein (Intel)
Chipmaker perspective
- Florian Gstrein (Intel)
09:45 - 10:35
Room: Grace Dodge Auditorium
10:35 Break
Break
10:35 - 10:45
Room: Grace Dodge Auditorium
10:45 Tool & Imaging - Mark van de Kerkhof (ASML)
Tool & Imaging
- Mark van de Kerkhof (ASML)
10:45 - 11:35
Room: Grace Dodge Auditorium
11:35 Metrology & Inspection - Hiroki Miayi (Lasertec)
Metrology & Inspection
- Hiroki Miayi (Lasertec)
11:35 - 12:25
Room: Grace Dodge Auditorium
12:25 Lunch
Lunch
12:25 - 13:30
Room: Dining Hall
13:30 Patterning materials (resists) - Amrit Narasimhan (Inpria)
Patterning materials (resists)
- Amrit Narasimhan (Inpria)
13:30 - 14:20
Room: Grace Dodge Auditorium
14:20 Process / pattern transfer - Danilo De Simone (IMEC)
Process / pattern transfer
- Danilo De Simone (IMEC)
14:20 - 15:10
Room: Grace Dodge Auditorium
15:10 Break
Break
15:10 - 15:25
Room: Grace Dodge Auditorium

15:25 Time for discussion & review instant polling results
Time for discussion & review instant polling results
15:25 - 16:15
Room: Grace Dodge Auditorium

16:15 Summarize agreements / common understanding
Summarize agreements / common understanding
16:15 - 16:45
Room: Grace Dodge Auditorium

16:45 Closing remarks
Closing remarks
16:45 - 17:15
Room: Grace Dodge Auditorium

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