Eureka and Friends Hosted by CXRO

US/Pacific
Auditorium (Bldg 66)

Auditorium

Bldg 66

1 Cyclotron Road Berkeley, CA 94720
Description

Welcome to the First Eureka and Friends Workshop hosted by the Center for X-Ray Optics (CXRO) at LBNL.  

We plan to provide an overview of the current research and facilities at CXRO, with an outlook of what we are planning for the future.

The main topics will be:

- The MET5 0.5NA micro-exposure tool

- Resist fundamentals

- EUV imaging / mask aerial image tool

This will be a hybrid meeting on 18 January 2024, starting at 3:30pm (Pacific Standard Time) at Lawrence Berkeley National Laboratory, in Building 66 - Auditorium for on-site participants.  Online participants can join the meeting via Microsoft Teams. 

Please submit your registration HERE if you are attending the meeting.

We look forward to seeing you either in person or online!

If you have any questions, please contact 

Bruno La Fontaine (CXRO Director)
[email protected]
+1-408-505-6545

Lady Bonifacio - Event Coordinator
[email protected]
+1-510-691-4998

Participants
    • 14:00 15:15
      Tour of facilities by CXRO Team 1h 15m ALS Facilities (Bldg 6)

      ALS Facilities

      Bldg 6

      (for on-site visitors who are interested)

    • 15:30 15:45
      Welcome & Introductions 15m Auditorium

      Auditorium

      Bldg 66

      1 Cyclotron Road Berkeley, CA 94720

      Welcome to LBNL and CXRO
      40 Years of CXRO
      Acknowledgment of departing Director

    • 15:45 16:15
      CXRO Overview 30m Auditorium

      Auditorium

      Bldg 66

      1 Cyclotron Road Berkeley, CA 94720
      Speaker: Bruno La Fontaine
    • 16:15 17:00
      MET5 Update 45m Auditorium

      Auditorium

      Bldg 66

      1 Cyclotron Road Berkeley, CA 94720
      Speaker: Ryan Miyakawa
    • 17:00 17:15
      Break 15m Auditorium

      Auditorium

      Bldg 66

      1 Cyclotron Road Berkeley, CA 94720

      Play slideshow of CXRO through the years

    • 17:15 17:45
      EUV Resists Fundamentals update 30m Auditorium

      Auditorium

      Bldg 66

      1 Cyclotron Road Berkeley, CA 94720
      Speaker: Oleg Kostko
    • 17:45 18:15
      SHARP EUV Aerial Image Microscope Update 30m Auditorium

      Auditorium

      Bldg 66

      1 Cyclotron Road Berkeley, CA 94720
      Speaker: Markus Benk
    • 18:15 18:30
      Closing remarks 15m Auditorium

      Auditorium

      Bldg 66

      1 Cyclotron Road Berkeley, CA 94720
      Speaker: Bruno La Fontaine
    • 18:30 20:00
      Hors-D'Oeuvres and Refreshments 1h 30m Auditorium

      Auditorium

      Bldg 66

      1 Cyclotron Road Berkeley, CA 94720