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Eureka and Friends Hosted by CXRO

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Auditorium (Bldg 66)

Auditorium

Bldg 66

1 Cyclotron Road Berkeley, CA 94720
Description

Welcome to the First Eureka and Friends Workshop hosted by the Center for X-Ray Optics (CXRO) at LBNL.  

We plan to provide an overview of the current research and facilities at CXRO, with an outlook of what we are planning for the future.

The main topics will be:

- The MET5 0.5NA micro-exposure tool

- Resist fundamentals

- EUV imaging / mask aerial image tool

This will be a hybrid meeting on 18 January 2024, starting at 3:30pm (Pacific Standard Time) at Lawrence Berkeley National Laboratory, in Building 66 - Auditorium for on-site participants.  Online participants can join the meeting via Microsoft Teams. 

Please submit your registration HERE if you are attending the meeting.

We look forward to seeing you either in person or online!

If you have any questions, please contact 

Bruno La Fontaine (CXRO Director)
[email protected]
+1-408-505-6545

Lady Bonifacio - Event Coordinator
[email protected]
+1-510-691-4998

Participants
  • Adam Schwartzberg
  • Amrit Narasimhan
  • Andreas Scholl
  • Antoine Wojdyla
  • Arian Gashi
  • Arnaud Allezy
  • Ashley White
  • Bruno La Fontaine
  • Byung Gook Kim
  • Chang-Yong Nam
  • Chawon Koh
  • Cheng Wang
  • Cheolhong Park
  • Chris Anderson
  • Cong Que DINH
  • Dan Krotz
  • Daniel Santon
  • Dima Zaytsev
  • Dong Gun LEE
  • Dong Seok Nam
  • Eric Gullikson
  • Eric Mattson
  • Erik Sohmen
  • Florian Gstrein
  • Gabriel Lee
  • Grant Kloster
  • Guojing Zhang
  • Harry Levinson
  • Henry Kapteyn
  • Hyeok Yun
  • Hyun-Dam Jeong
  • James Blackwell
  • Jeffrey Bokor
  • Jinkyu Han
  • jinyuan yan
  • Jiyoung Bang
  • Johannes Bauer
  • John Shalf
  • Kas Andrle
  • Kayoko Cho
  • Kazuyo Morita
  • Kenneth Goldberg
  • Kevin Gu
  • Komuro Yoshitaka
  • Lady Bonifacio
  • Lauren Doyle
  • Lauren McQuade
  • Markus Benk
  • Martin Izquierdo
  • Matt Nerzig
  • Melissa Summers
  • Meng Zhang
  • Mengshu Zhang
  • Mi-Young Im
  • Michael Connolly
  • Motohiro Shiratani
  • Myung Mo Sung
  • NISHIKI FUJIMAKI
  • Oleg Kostko
  • Patrick Naulleau
  • PETER Fischer
  • Qi Zhang
  • Rajeev Rajendran
  • Ramakrishnan Ayothi
  • Regina Soufli
  • Ricardo Ruiz
  • Ryan Miyakawa
  • Sange Phuntsok
  • Sarath Samudrala
  • Seiji Nagahara
  • Senajith (Seno) Rekawa
  • Siyoung LEE
  • Sukjong Bae
  • Theresa Duque
  • Tomohiro Oikawa
  • TORU FUJIMORI
  • TSUNEHIRO NISHI
  • Warren Holcomb
  • Weilun Chao
  • Wonchul Kee
  • Yi Li
  • Yusuke Otsubo
    • 1
      Tour of facilities by CXRO Team ALS Facilities (Bldg 6)

      ALS Facilities

      Bldg 6

      (for on-site visitors who are interested)

    • 2
      Welcome & Introductions Auditorium

      Auditorium

      Bldg 66

      1 Cyclotron Road Berkeley, CA 94720

      Welcome to LBNL and CXRO
      40 Years of CXRO
      Acknowledgment of departing Director

    • 3
      CXRO Overview Auditorium

      Auditorium

      Bldg 66

      1 Cyclotron Road Berkeley, CA 94720
      Speaker: Bruno La Fontaine
    • 4
      MET5 Update Auditorium

      Auditorium

      Bldg 66

      1 Cyclotron Road Berkeley, CA 94720
      Speaker: Ryan Miyakawa
    • 17:00
      Break Auditorium

      Auditorium

      Bldg 66

      1 Cyclotron Road Berkeley, CA 94720

      Play slideshow of CXRO through the years

    • 5
      EUV Resists Fundamentals update Auditorium

      Auditorium

      Bldg 66

      1 Cyclotron Road Berkeley, CA 94720
      Speaker: Oleg Kostko
    • 6
      SHARP EUV Aerial Image Microscope Update Auditorium

      Auditorium

      Bldg 66

      1 Cyclotron Road Berkeley, CA 94720
      Speaker: Markus Benk
    • 7
      Closing remarks Auditorium

      Auditorium

      Bldg 66

      1 Cyclotron Road Berkeley, CA 94720
      Speaker: Bruno La Fontaine
    • 8
      Hors-D'Oeuvres and Refreshments Auditorium

      Auditorium

      Bldg 66

      1 Cyclotron Road Berkeley, CA 94720
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