Welcome to the First Eureka and Friends Workshop hosted by the Center for X-Ray Optics (CXRO) at LBNL.
We plan to provide an overview of the current research and facilities at CXRO, with an outlook of what we are planning for the future.
The main topics will be:
- The MET5 0.5NA micro-exposure tool
- Resist fundamentals
- EUV imaging / mask aerial image tool
This will be a hybrid meeting on 18 January 2024, starting at 3:30pm (Pacific Standard Time) at Lawrence Berkeley National Laboratory, in Building 66 - Auditorium for on-site participants. Online participants can join the meeting via Microsoft Teams.
Please submit your registration HERE if you are attending the meeting.
We look forward to seeing you either in person or online!
If you have any questions, please contact
Bruno La Fontaine (CXRO Director)
[email protected]
+1-408-505-6545
Lady Bonifacio - Event Coordinator
[email protected]
+1-510-691-4998
